Drives for the semiconductor industry
The semiconductor industry is one of the most innovative and dynamic sectors worldwide. Driven by the demand for high-performance chips for artificial intelligence, cloud computing, electromobility, and 5G, investment in new manufacturing capacity continues to rise unabated. While Asia continues to be the center of global production, new manufacturing facilities are increasingly being built in North America and Europe to strengthen supply security. The highest cleanroom standards, absolute precision, and round-the-clock reliability are the determining factors for drive solutions in this environment.
Opening and closing the cover of vacuum chambers
In wafer production, heavy vacuum chamber lids must be moved safely and cleanly. Our customized drive systems based on the Compacta series provide enormous torque for this purpose and feature a smooth, fanless design that does not stir up any particles. A special non-stick coating facilitates cleaning and supports cleanroom use.
Lifting the lids of lithography machines
Lithography systems require machine lids weighing several tons to be moved. Our customized linear drives are used for this purpose, performing lifting and swiveling movements precisely and reliably. In addition, modified Compacta drives move the lid to the side so that maintenance work can be carried out easily and safely.
Swivel and lift drive for vacuum valve locks
Vacuum valves are essential for controlled gas flow in semiconductor equipment. Our combination of customized spur and bevel gears enables precise rotary and lift movements and ensures that valves open and close reliably thousands of times a day—without compromising tightness or process reliability.
Autonomous transport robots in clean rooms
Wheel hub drives from Framo Morat are used to transport sensitive wafers in clean rooms. They power driverless transport systems that automatically move wafers between process stations. The enclosed drive units operate quietly, with low vibration and no particles—crucial for clean room compatibility.
